A biocompatible Parylene thermal flow sensing array
نویسندگان
چکیده
A microelectromechanical systems (MEMS) thermal flow sensing array constructed of biocompatible materials has been designed, fabricated, nd tested. In addition to the construction, the electronic biasing conditions were selected such that sensor operation was compatible with biological uids. The device comprises several thin film platinum sensing elements sandwiched in a Parylene C membrane. The membrane is suspended over bulk-micromachined silicon channel for improved thermal isolation. This sensing array layout permits, for the first time, operation in multiple ow sensing modes using a single device. Multi-mode testing was performed in hot-film, calorimetric, and time-of-flight modes at low overheat atios. Furthermore, constant current (CC) and constant temperature (CT) biasing methods were explored in hot-film mode. The results of the arious testing modes were compared and flow sensing down to 0.5 L/min has been demonstrated. 2007 Elsevier B.V. All rights reserved.
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